Spatial variations in local switching parameters of ferroelectric random access memory capacitors
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چکیده
منابع مشابه
Three-dimensional high-resolution reconstruction of polarization in ferroelectric capacitors by piezoresponse force microscopy
A combination of vertical and lateral piezoresponse force microscopy ~VPFM and LPFM, respectively! has been used to map the out-of-plane and in-plane polarization distribution, respectively, of ~111!-oriented Pb(Zr,Ti)O3-based ~PZT! ferroelectric patterned and reactively-ion-etched capacitors. While VPFM and LPFM have previously been used to determine the orientation of the polarization vector ...
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